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Başlık: Correlation of TEM data with confined phonons to determine strain and size of Ge nanocrystals embedded in SixNy matrix
Yazarlar: Bahariqushchi, Rahim
Gündoğdu, Sinan
Uludağ Üniversitesi/Mühendislik Fakültesi/Elektrik-Elektronik Mühendisliği Bölümü.
Aydınlı, Atilla
ABI-7535-2020
7005432613
Anahtar kelimeler: Physics
Quantum-confinement
Raman-scattering
Silicon
Germanium
Photoluminescence
Spectra
Dots
Germanium
Matrix algebra
Phonons
Plasma CVD
Plasma enhanced chemical vapor deposition
Silicon nitride
Confined phonons
Dielectric matrixes
Direct measurement
Ge nanocrystals
Nanocrystal sizes
Phonon confinement
Silicon nitride matrix
Plasma enhanced chemical vapor depositions (PE CVD)
Nanocrystals
Yayın Tarihi: 6-Haz-2017
Yayıncı: Elsevier
Atıf: Bahariqushchi, R. vd. (2017). ''Correlation of TEM data with confined phonons to determine strain and size of Ge nanocrystals embedded in SixNy matrix''. Superlattices and Microstructures, 111, 90-95.
Özet: Models that use phonon confinement fail to provide consistent results for nanocrystal sizes in differing dielectric matrices due to varying stress experienced by nanocrystals in different dielectric environments. In cases where direct measurement of stress is difficult, the possibility of stress saturation as a function of size opens up a window for the use of phonon confinement to determine size. We report on a test of this possibility in Ge: SixNy system. Ge nanocrystals (NCs) embedded in silicon nitride matrix have been fabricated using plasma enhanced chemical vapor deposition (PECVD) followed by post annealing in Ar ambient. Nanocrystal size dependence of Raman spectra was studied taking into account associated stress and an improved phonon confinement approach. Our analysis show same stress for NCs which have sizes below 7.0 nm allowing the use of phonon confinement to determine the nanocrystal size. The results are compared with TEM data and good agreement is observed.
URI: https://doi.org/10.1016/j.spmi.2017.06.020
https://www.sciencedirect.com/science/article/pii/S0749603617311060
http://hdl.handle.net/11452/31540
ISSN: 0749-6036
Koleksiyonlarda Görünür:Web of Science

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